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Scrubber Element It’s Tome to Replace Your Scrubber Element ASTG Excimer Laser Gas Scrubber Element tailored specifically to maximize absorption of the acid gases typically found in Excimer Laser gases ASTG Excimer Laser Gas Scrubber Element Analytical Science & Technologies Group, Inc. has developed a drop-in replacement Scrubber Element to replace Spectra Gases Part Number 10036 used in SpectraPure F5300 Scrubber Systems. These scrubber elements are required to be replaced annually or following a toxic gas release. Over time, exposure to the air does degrade the active scrubber media – hence the requirement for period change outs. The scrubber element consists of three parts – inlet filter, active scrubber media section and outlet dust filter. These are assembled into an aluminum frame. The active scrubber media is tailored specifically to maximize adsorption of the acid gases typically found in Excimer Laser gases —Fluorine (Hydrofluoric Acid when exposed to air) and Hydrochloric Acid. Specifications: 23.5” x 23.5” x 3.75” sized to fit 24” x 24” x 4” slot in SpectraPure Scubbers Total weight of scrubber element 27lbs (12kg)
Active weight of scrubber media 22lbs (10kg) Fresh scubber element capacity: 8% by weight of HF   20% by weight of HCl To place an order please call 1.888.363.2541
Please use this   contact link or email us at   for additional information.
For an overview of ASTG’s specialty gas services and product line, 
please visit our company website at
ASTG Gas management Solutions Analytical Science and Technologies Group     2 Spring Street, Newton, NJ USA 07860     ph: 1.888.363.2541     em:

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